THE INSTRUMENTS AND SOFTWARE TOOLS FOR ELECTRON-PROBE ANALYTICAL DEVICES DEVELOPMENT

Yu. A. Djomin, E.L. Demchenko, V.A. Il’in, V.V. Luchinin,
A.A. Petrov, M. Yu. Feoktistov

St.Petersburg State Electrotechnical University

The results of development of instruments and software shell for the automated multipurpose electron-probe measurements (scanning electron microscopy, Auger-electron spectroscopy, X-ray microanalysis) were reported in this study. The block-schemes, main parameters of basic modules, the abilities and features of unified software tools for device control, experimental data collection, processing and interpretation were described.