SYSTEM FOR VISUALIZATION AND COMPUTER ANALYSIS OF THE REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION PATTERNS

V.N. Petrov, V.N. Demidov, N.P. Korneeva, N.K. Polyakov, G.E. Cirlin

Institute for Analytical Instrumentation RAS, St.Petersburg

An efficient and fast system for visualization, input into the computer and analysis of reflection high-energy electron diffraction patterns is described. The block diagrams and technical characteristics of the system, together with the units for control of the growth of semiconductor structures during molecular beam epitaxy, are presented. The software designed for this system ensuring handling patterns of reflection high-energy electron diffraction, including real time representation and automation of processes of the epitaxial growth, is described.