The paper outlines principal concepts and trends of scientific and technological development of microsystem engineering as a basis for future generations of instruments, machines and technologies. Key lines of the microsystem engineering development have been considered including sensors and transducers, analytical and/or technological microsystems, micro- and nanoinstruments, micromachines, and self-contained miniature power supply systems. A conclusion has been drawn about the "revolutionary" character of the microsystem technology impact upon new generations of equipment.