ALGORITHM TO ATTAIN AN UTMOST ACCURACY IN PLANE-SYMMETRIC ELECTROSTATIC ELEMENT CALCULATIONS FOR ELECTRON- AND ION-OPTICAL INSTRUMENTS

Shevchenko S.I.

Institute for Analytical Instrumentation RAS, St.Petersburg

The soursces of accuracy losses in plane-symmetric electrostatic element calculations for electron- and ion-optical instruments are considered. An algorithm is formulated to take account of those sources and to minimize their contribution to the calculation error.