FAST ELLIPSOMETER FOR CONTINUOUS MEASUREMENT OF FILM PARAMETERS

A.M.Badalian, V.V.Kaichev, E.A.Podgornov

Institute of Inorganic Chemistry, Siberian Branch RAS, Novosibirsk

A high-sensitive device based on well-known rotating analyser modulation technique for measurement of rotation angle of the polarization ellipsoid is described. A distinguished feature of the device is a negative feedback proportional to the magnitude of phase shift in the analysed and reference signals. The sensitivity value achieved for the rotation angle is about 0.001 degree.