X-RAY PHOTOELECTRON SPECTROMETER
FOR CHEMICAL ANALYSIS OF SOLIDS
V. D. Belov, N. V. Mamro, B. V.Bardin, I. R. Nikolaev
Institute for Analytical Instrumentation RAS, Saint-Petersburg
An experimental model of XPS spectrometer
oriented towards the problems of determination of the chemical composition
of solids such as metal alloys, semiconductors and insulators, polymers,
composite materials is created. The instrument is built based on the
electron spectrometer ES2403, analytical and vacuum systems produced by domestic
industry and possessing (as operating experience the usages shows)
long service life and serviceability.
The spectrometer consists of the following pars:
- electron energy-analyzer based on the electrostatic hemispherical capacitor
with a multielectrode retarding lens system at the input of the analyzer,
- X-ray source providing intense MgKα and AlKα radiation,
- spectrometer rack,
- power supply units,
- analyzer data system,
- Windows package of software programs for automatic control and data acquisition.
The spectrometer is characterized by energy resolution in the range of (0.9--1.0)
eV, peak shift and binding energy measurement error less than 0.1 eV.