LOCAL  FORCE  AND  TUNNELING  INTERACTION  SENSOR 
FOR  A  SCANNING  PROBE  MICROSCOPE

A. A. Vasiliev, S. Yu. Kerpeleva*, V. V. Kotov**, I. D. Sapozhnikov, A. O. Golubok

Institute for Analytical Instrumentation RAS, Saint-Petersburg
*Saint-Petersburg State University of Information Technology, Mechanics and Optics
**NANOTEKHNOLOGIA-MDT Close Joint-Stock Company, Zelenograd

    The paper presents a multipurpose sensor of tunneling and force interactions in a scanning probe microscope (SPM). A mathematical model of the sensor for the semicontact force mode is offered. The influence of the to-pography and local rigidity on the SPM image contrast is discussed.