S. M. Irkaev, V. G. Semenov*, V. E. Kurochkin, N. A. Makarov*,
V. V. Panchuk*, A. L. Ter-Martirosyan**, K. P. Cherneutsanu
Institute for Analytical Instrumentation RAS, Saint-Petersburg
*St. Petersburg State University
**Semiconductor Devices, Close Joint-Stock Company
The first part of the paper describes the physical principles,
x- and gamma-ray schemes of various spectrometric techniques
for surface studies based on the grazing incidence geometry. The experimental
data obtained demonstrate potentials of each method. An overall optical
schematic of the multifunctional spectrometer for non-destructive, depth-selective,
contactless physico-chemical surface analysis of objects being studied
is given.