V. V. Bobro*, O. S. Dron, N. I. Komyak, A. I. Semenenko**
Institute for Analytical Instrumentation RAS,
Saint-Petersburg
*OAO «Feodosia Instrument Engineering
Plant»
**Institute of Applied Physics, the Ukraine
NAS, Sumy
The metrogical advantages and specific features of metrological certification of an ellipsometer combining the zero and photometric approaches are discussed.