V. V. Bobro, Semenenko*
OAS «Feodosija Instrument-Making Plant»
*Institute of Applied Physics NASU, Sumy
Special features of metrological support in ellipsometry are examined. A new approach to metrology in ellipsometry is produced, where the spread of the measured polarizing angles psi and delta over the measurement zones is studied as an objective metrological criterion. Experimental results over zone dispersion of angles psi and delta on samples with ultrathin surface films are shown.