V. N. Petrov, N. K. Polyakov, V. N. Demidov, N. P. Korneeva, G. E. Cirlin
Institute for Analytical Instrumentation RAS, Saint-Petersburg
In this paper the history of
designing molecular-beam epitaxy systems of the EP class in Russia is reviewed.
The scientific results on the theoretical and experimental studies of the
epitaxial growth in the laboratory for epitaxial technologies at the Institute
for Analytical Instrumentation RAS during 1993–1999 are presented. An efficient
and fast system for visualisation, input into the computer and analysis
of reflection high-energy electron diffraction patterns and the system
for automation of the epitaxial growth processes are described.
The trends and perspectives of further exploring
the equipment and technological approaches
in molecular-beam epitaxy are given.