O. M. Gorbenko, S. A. Masalov, P. A. Fridman, G. E. Cirlin, A. O. Golubok
Institute for Analytical Instrumentation RAS, Saint-Petersburg
Algorithm which allows one
to define image element sizes is suggested. It is based on statistical
analysis of two-dimensional random fields and spectral density calculation.
The result of image processing by this method is probability distribution
function for the element sizes. The algorithm was tested and its effectiveness
was shown in the work with model random fields. Scanning tunneling microscopy
images of semiconductor nanostructures (quantum dots) were processed by
this algorithm. Lateral sizes of quantum dots were estimated. The method
can be also used in element shape description.